VCR head drum coated with diamond-like hard carbon films and the method and apparatus for manufacturing the same
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United States of America Patent
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Aug 17, 1999
Issued Date -
N/A
app pub date -
Mar 19, 1997
filing date -
Jul 26, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A head drum is coated with double films, each having different characteristics, by forming a first diamond-like hard carbon film of high degree of hardness and then forming a second diamond-like hard carbon film of a lower degree of hardness thereon. The degree of hardness of the second film is lower than that of the first film. The double coating is performed by means of a synthesizing apparatus which comprises a reactor consisting of a power supply electrode, a workpiece support and and an annular ground electrode spaced from the stacked head drums by a predetermined distance.
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