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Abstract

A circular membrane diaphragm is edge-mounted on a generally cylindrical housing structure that allows the diaphragm to deform when a differential pressure is applied across it. The housing structure also supports a circular electrode in an internal chamber and in close proximity to the back surface of the diaphragm to form a variable capacitor. The outer side of the membrane is exposed to a second chamber defined by the housing structure and a cover. A tube connects the second chamber to a gas whose pressure is to be measured. The back of the housing structure is exposed to atmospheric pressure and other ambient atmospheric conditions. The housing structure is characterized by double flanges spaced axially by a deep lateral groove. A central cylindrical boss extends axially from the back side of the housing. The outer diameter B of the boss is at least equal to the diameter E of the groove. This housing structure provides the membrane with a high degree of isolation from external pressure fluctuations. A feedthrough assembly to the electrode is centrally located in the housing. For vacuum and absolute pressure measurements, a sealable vacuum conduit and a chemical getter assembly are also mounted in the central portion of the housing.

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First Claim