Laser interferometer measurement system for use with machine tools
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United States of America Patent
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Aug 17, 1999
Issued Date -
N/A
app pub date -
Apr 28, 1995
filing date -
Oct 11, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A measurement system for precisely measuring the distance between two points is disclosed. The measurement system includes a laser interferometer assembly having a beam splitter and a first reflector disposed to reflect a laser beam along a linear path. The laser interferometer assembly cooperates with a deadpath elimination cell having a sealed hollow interior region. The hollow interior region is sealed by at least one window disposed at the end of the hollow interior region proximate the first reflector. A second reflector is disposed on the opposite side of the hollow interior region and is oriented to reflect the laser beam back along the linear path. Thus, the volume and quantity of gas within the hollow interior remains constant to increase the accuracy in measuring the distance between the first and second reflectors.
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