Stage control method and apparatus with varying stage controller parameter
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United States of America Patent
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Aug 17, 1999
Grant Date -
N/A
app pub date -
May 17, 1996
filing date -
May 17, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An improvement in the performance characteristics of a controller for a high precision positioning system, by continuously updating a variable parameter in the controller transfer function in response to, and as a continuously monotonically decreasing function of, the measured position error signal, with a small error cutoff. The error convergence, noise, and stability characteristics of the controller are improved over that of a constant-parameter controller. The variable parameter can also be tailored to prevent saturation of the amplifier that is driven by the controller and which drives the mechanical system whose position is being controlled.
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