US Patent No: 5,942,054

Number of patents in Portfolio can not be more than 2000

Micromechanical device with reduced load relaxation

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Abstract

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An improved elastic member (24) for micromechanical devices (12). The micromechanical device (12) includes a stationary member (28) and a moving member (26) which are connected together by a elastic member (24). Because of repeated and frequent movement of the moving member (26), the elastic member (24) can become permanently flexed or deformed, resulting in poor operation of the device. Aluminum alloys are formed to include oxygen, in combination with nitrogen if desired, to obtain a film with dramatically reduced load relaxation characteristics. Oxygen is added to an Argon sputter gas during deposition, and an amorphous film is produced.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX15165

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carpenter, Elliott Keith Lewisville, TX 1 13
Knipe, Richard Lee McKinney, TX 6 13
Orent, Thomas William Garland, TX 1 13
Tregilgas, John Harold Dallas, TX 3 16
Yoshihara, Hidekazu Plano, TX 20 126

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (2)
* 5,061,049 Spatial light modulator and method 735 1990
* 5,552,924 Micromechanical device having an improved beam 249 1994
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
* 5,413,974 Aluminum-containing oxide and process for producing aluminum-containing oxide 32 1991
 
RESEARCH DEVELOPMENT CORPORATION OF JAPAN (1)
* 4,837,094 Oxygen-containing ferromagnetic amorphous alloy and method of preparing the same 16 1987
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
VENTURE LENDING & LEASING IV, INC. (5)
7,057,246 Transition metal dielectric alloy materials for MEMS 3 2001
7,071,520 MEMS with flexible portions made of novel materials 4 2002
7,057,251 MEMS device made of transition metal-dielectric oxide materials 15 2002
6,952,302 Hinge structures for micro-mirror arrays 0 2003
7,459,402 Protection layers in micromirror array devices 62 2005
 
TEXAS INSTRUMENTS INCORPORATED (2)
7,436,573 Electrical connections in microelectromechanical devices 39 2005
7,866,036 Method of fabricating micromirror device 0 2008
 
EASTMAN KODAK COMPANY (1)
6,561,627 Thermal actuator 99 2000
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (1)
7,184,193 Systems and methods for amorphous flexures in micro-electro mechanical systems 1 2004
 
RICOH COMPANY, LTD. (1)
8,054,327 Optical scanning device and image forming apparatus using the same 0 2009
 
SILICON QUEST KABUSHIKI-KAISHA (1)
7,652,813 Mirror device 1 2008
 
SPATIAL PHOTONICS, INC. (1)
7,586,669 Non-contact micro mirrors 2 2006
 
SUMITOMO PRECISION PRODUCTS CO., LTD. (1)
* 7,188,524 Conductive element for a movable electric circuit and a vibration gyroscope 3 2004
* Cited By Examiner