Micromechanical device with reduced load relaxation

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO

5942054

SERIAL NO

08772588

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An improved elastic member (24) for micromechanical devices (12). The micromechanical device (12) includes a stationary member (28) and a moving member (26) which are connected together by a elastic member (24). Because of repeated and frequent movement of the moving member (26), the elastic member (24) can become permanently flexed or deformed, resulting in poor operation of the device. Aluminum alloys are formed to include oxygen, in combination with nitrogen if desired, to obtain a film with dramatically reduced load relaxation characteristics. Oxygen is added to an Argon sputter gas during deposition, and an amorphous film is produced.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX16971

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carpenter, Elliott Keith Lewisville, TX 1 13
Knipe, Richard Lee McKinney, TX 5 16
Orent, Thomas William Garland, TX 1 13
Tregilgas, John Harold Dallas, TX 3 17
Yoshihara, Hidekazu Tsukuba, JP 18 156

Cited Art Landscape

Patent Info (Count) # Cites Year
 
ASAHI KASEI KABUSHIKI KAISHA (1)
* 5413974 Aluminum-containing oxide and process for producing aluminum-containing oxide 32 1991
 
TEXAS INSTRUMENTS INCORPORATED (2)
* 5061049 Spatial light modulator and method 772 1990
* 5552924 Micromechanical device having an improved beam 260 1994
 
CASIO COMPUTER CO., LTD. (1)
* 4837094 Oxygen-containing ferromagnetic amorphous alloy and method of preparing the same 16 1987
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 2004/0164,420 Sputtering target compositions, and methods of inhibiting copper diffusion into a substrate 1 2004
* 2009/0290,205 OPTICAL SCANNING DEVICE AND IMAGE FORMING APPARATUS USING THE SAME 6 2009
 
SUMITOMO PRECISION PRODUCTS CO., LTD. (2)
* 7188524 Conductive element for a movable electric circuit and a vibration gyroscope 3 2004
* 2005/0000,285 Conductive element for a movable electric circuit and a vibration gyroscope 1 2004
 
SPATIAL PHOTONICS, INC. (2)
7586669 Non-contact micro mirrors 3 2006
* 2008/0123,206 SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS 1 2006
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
7184193 Systems and methods for amorphous flexures in micro-electro mechanical systems 1 2004
* 2006/0072,187 Systems and methods for amorphous flexures in micro-electro mechanical systems 1 2004
* 2006/0254,677 Substitutionally alloyed intermetallic compounds 0 2005
 
EASTMAN KODAK COMPANY (1)
6561627 Thermal actuator 102 2000
 
VENTURE LENDING & LEASING IV, INC. (7)
7057246 Transition metal dielectric alloy materials for MEMS 4 2001
7071520 MEMS with flexible portions made of novel materials 6 2002
7057251 MEMS device made of transition metal-dielectric oxide materials 17 2002
* 2003/0036,215 MEMS device made of transition metal-dielectric oxide materials 42 2002
6952302 Hinge structures for micro-mirror arrays 0 2003
* 2004/0156,089 Hinge structures for micro-mirror arrays 0 2003
7459402 Protection layers in micromirror array devices 75 2005
 
SILICON QUEST KABUSHIKI-KAISHA (2)
7652813 Mirror device 1 2008
* 2008/0285,112 Mirror device 2 2008
 
TEXAS INSTRUMENTS INCORPORATED (4)
7436573 Electrical connections in microelectromechanical devices 51 2005
* 2005/0250,362 Electrical connections in microelectromechanical devices 0 2005
7866036 Method of fabricating micromirror device 0 2008
* 2009/0039,536 Electrical Connections in Microelectromechanical Devices 1 2008
 
RICOH COMPANY, LTD. (1)
8054327 Optical scanning device and image forming apparatus using the same 1 2009
* Cited By Examiner