Hydrogenated carbon thin films
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United States of America Patent
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Aug 24, 1999
Grant Date -
N/A
app pub date -
Jan 31, 1997
filing date -
Jan 31, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The embodiments of the invention are one, two or three layer protective hydrogenated carbon (C:H) thin film coatings on a disk with hydrogenation levels that are higher at the surface and decrease from the surface downward toward the substrate. The hydrogen content of the various layers or zones of the overcoat are optimized to use the varying properties of C:H films such as good adhesion obtained with a low level of hydrogen, the high hardness of an intermediate level of hydrogen content and the low surface energy of a high hydrogen content film. In one embodiment the disk is coated with a sputtered C:H thin film with a gradient in the hydrogen concentration, with the concentration increasing toward the film surface. A second embodiment of the invention uses two layers in which the hydrogen content of bottom layer is lower than the surface layer. A third embodiment of the invention uses a three layer construction of the thin-film having a minimum hydrogenation level in the bottom layer, an intermediate hydrogenation level in the middle layer and a high hydrogenation level in the top layer.
First Claim
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- 15 United States
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Patent Owner(s)
| Patent Owner | Address | |
|---|---|---|
| HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B V | AMSTERDAM AMSTERDAM NORTH HOLLAND |
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Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| White, Richard Longstreth | Los Altos, CA | 9 | 29 |
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| Fee | Large entity fee | small entity fee | micro entity fee | due date |
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| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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