Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
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United States of America Patent
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Aug 24, 1999
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N/A
app pub date -
Apr 10, 1997
filing date -
Apr 10, 1997
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Abstract
A capacitive pressure sensor includes a chamber coupled to a region whose pressure is to be determined. The sensor includes a conductive flexible diaphragm and a pair of electrodes, each defining a capacitance with the diaphragm. Variations in pressure in the chamber cause deflection of the diaphragm which in turn causes variation in the capacitances. A processing circuit applies an excitation signal to the capacitances and couples the capacitances to inductive elements. A current through the inductive elements is detected to determine the difference in the sensor capacitances and, therefore, the deflection of the diaphragm and the pressure in the chamber.
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