Mars optical modulators
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United States of America Patent
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Aug 24, 1999
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N/A
app pub date -
Aug 12, 1998
filing date -
Aug 12, 1998
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Abstract
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which transition layers of SiN.sub.x are provided on either side of the air gap, and the thickness ratio of the two transition layers is adjusted to provide a tradeoff between the insertion loss of the device and the optical bandwidth.
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