Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method
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United States of America Patent
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Aug 24, 1999
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app pub date -
May 5, 1998
filing date -
May 5, 1998
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Abstract
A micro-mechanical, anti-reflective, switched optical modular array that utilizes a continuous, uninterrupted modular membrane across an array of individual modulators. The individual modulators are positioned within an optical window of the device, the optical window being defined by a region of the membrane situated between an array of electrode pairs, where an individual pair of electrodes is used to control an individual one of the modulators. Alternative electrode shapes and fabrication methods are described.
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