Substrate processing apparatus
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United States of America Patent
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Aug 31, 1999
Grant Date -
N/A
app pub date -
Oct 24, 1997
filing date -
Oct 28, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate processing apparatus adapted to properly perform a substrate scrubbing process with the use of a scrubbing member. The apparatus includes a retention member for retaining a scrubbing member for scrubbing a substrate and a vertical drive mechanism for vertically moving the retention member. The state of the scrubbing member and the vertical position of the retention member are sensed, and a vertical position of the retention member suitable for the scrubbing of the substrate is determined on the basis of the results of the sensing. Then, the retention member is moved to the position thus determined.
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