Pickup chuck with an integral heat pipe
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United States of America Patent
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-
Aug 31, 1999
Grant Date -
N/A
app pub date -
Dec 30, 1997
filing date -
Dec 30, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus and method for controlling the temperature of a heat generating device. In one embodiment, a pickup chuck having a heat pipe is provided. The heat pipe includes a first end defining an evaporator portion and a second end defining a condenser portion. A thermally conductive member at the first end of the heat pipe is adapted to engage a surface of the heat generating device. Heat is transferred away from the heat generating device by engaging the thermally conductive member with a surface of the heat generating device.
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