Ink jet head having a protective layer with a controlled argon content
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United States of America Patent
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-
Aug 31, 1999
Issued Date -
N/A
app pub date -
May 8, 1996
filing date -
Dec 22, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a thin-film resistor element for an ink jet head. In the thin-film resister element, a protective film is used having a multi-layered structure, the proportion of Ar atoms contained in a lower area of the protective film located in contact with the heating resistor is set between 0.2 wt % and 6.0 wt %, and that in an upper area of the protective film is set between 1.0 wt % and 9.0 wt %.
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