Importance

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Abstract

The apparatus of the present invention includes a substrate and a thin active layer each comprising a semiconducting material. The substrate has a frame and a proof mass suspended from the frame by one or more flexures, and the active layer includes one or more vibratory force transducers suitable coupled to the proof mass for detecting a force applied to the proof mass. According to the present invention, an insulating layer, such as silicon oxide, is formed between the substrate and the active layer to insulate the active layer from the substrate. Providing a separate insulating layer between the substrate and active layer improves the electrical insulation between the proof mass and the transducers, which allows for effective operation over a wide range of temperatures. The vibratory force transducers comprise first and second parallel beams, each beam having one or more fingers extending laterally outward from the beam and intermeshed with fingers projecting laterally inward towards the beam from an electrode positioned adjacent to the beam.

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First Claim