Mars optical modulators
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United States of America Patent
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Sep 7, 1999
Grant Date -
N/A
app pub date -
Jul 30, 1998
filing date -
Jul 30, 1998
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Abstract
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.
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