Optical apparatus for monitoring profiles of textured spots during a disk texturing process
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United States of America Patent
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Sep 14, 1999
Issued Date -
N/A
app pub date -
Mar 24, 1997
filing date -
Mar 24, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. A visible laser beam is also directed along this optical system to an inspection spot on each side of the disk, by which a central portion of each textured spots passes. A beam angle detector detects deflection of a reflection of the inspection beam from this spot in the direction of motion of the disk at this spot. This deflection provides a measure of the topography of the spot.
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