Ultra-high purity Bourdon tube pressure gauge system
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United States of America Patent
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-
Sep 14, 1999
Grant Date -
N/A
app pub date -
Feb 12, 1998
filing date -
Feb 12, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A reduced volume socket body and a reduced volume tube are used in a pressure gauge system in semi-conductor fabrication process equipment. The socket body includes an outlet and the tube has an end connected to the outlet. The outlet is a shaped, weld prep formed on the socket body having an inner surface. A continuous seat is formed on the outlet and includes a seat thickness. The tube has an inner wall and an outer wall defining a wall thickness which is substantially the same as the seat thickness. The end of the tube is engaged with the seat so that the inner wall of the tube and the inner surface of the outlet are substantially aligned to form a crevice free tube-to-socket connection.
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