Spatial light modulator with improved light shield
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United States of America Patent
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Sep 14, 1999
Grant Date -
N/A
app pub date -
Oct 27, 1997
filing date -
Oct 29, 1996
priority date (Note) -
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Abstract
A spatial light modulator (10) having a micromechanical active portion (12) encompassed by a light shield (14). The light shield (14) is fabricated upon a substrate (36) and has a plurality of openings (72, and 80) to permit underlying layers of photoresist (90, 92) to be undercut from beneath the light shield. Removal of the photoresist layers provides a sufficiently flat light shield, and eliminates the possibility that particles from the photoresist layer could migrate to beneath active micromirrors (30) of the spatial light modulator (12).
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