Micro needle probe apparatus having probes cantilevered over respective electronic circuits, moving medium memory device including same and method of making same
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United States of America Patent
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-
Sep 14, 1999
Grant Date -
N/A
app pub date -
Apr 25, 1997
filing date -
Apr 25, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micro needle probe apparatus that includes a probe and its associated electronic circuit. The electronic circuit is formed in a substrate and includes at least one metal interconnection layer. The probe is cantilevered over the electronic circuit and is composed of a metal probe arm, a support post that anchors one end of the probe arm to the substrate, and a micro needle mounted adjacent the moveable end of the probe arm. The probe apparatus may be used as the read/write mechanism of the moving-medium type memory device.
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