Electrostatically-actuated structures for fluid property measurements and related methods
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United States of America Patent
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Sep 21, 1999
Grant Date -
N/A
app pub date -
Jan 13, 1998
filing date -
Jan 13, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.
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