Trench separator for self-defining discontinuous film
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United States of America Patent
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Sep 21, 1999
Grant Date -
N/A
app pub date -
May 29, 1997
filing date -
May 29, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A discontinuous film structure on a substrate, with an etch stop layer on the substrate, a separator layer with an opening formed therein on the etch stop layer and a discontinuous-as-deposited film on the separator layer, the discontinuity substantially in register with the opening. The structure is made into a stacked capacitor with the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.
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