Solid-state chemical sensor
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United States of America Patent
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Sep 28, 1999
Issued Date -
N/A
app pub date -
Jun 5, 1998
filing date -
Oct 21, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention pertains to a solid-state chemical sensor with a substrate support. On one side of the support is mounted a heating element with branch circuit connections. On the other side interdigital electrodes are arranged and thereon a carbon dioxide-sensitive material, which comprises CuO and TiO.sub.3, as well as additional metal oxides, in the form of a thick film of approximately 20-200 .mu.m.
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