Laser irradiation apparatus
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United States of America Patent
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Sep 28, 1999
Grant Date -
N/A
app pub date -
Mar 4, 1998
filing date -
Mar 4, 1997
priority date (Note) -
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Abstract
An apparatus for irradiating an irradiation surface with a laser light having a linear or rectangular shape. A homogenizer operates on the principle that variations in the light intensity profile of an original beam as emitted from a laser device are dispersed by passing the original beam through two multi-cylindrical lenses. The directions of the respective multi-cylindrical lenses are set so as not to be parallel with the beam movement direction. Thus, an uniformity of annealing by irradiating with a laser light is improved.
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