Substrate treatment apparatus
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United States of America Patent
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Sep 28, 1999
Grant Date -
N/A
app pub date -
Dec 3, 1997
filing date -
Dec 3, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate treatment apparatus comprises an arm holder for substantially horizontally holding each of substrates, a substrate transfer mechanism, having a vertical shaft, for moving the arm holder along the vertical shaft, swinging the arm holder about the vertical shaft, and horizontally advancing and retreating the arm holder, a first liquid process unit including a casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the first substrate with a liquid, and a second liquid process unit located adjacent to the first liquid process unit, and including the casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the second substrate with a liquid. Each of the treatment members of the first liquid process unit and a corresponding one of the treatment members of the second liquid process unit are arranged symmetrical on a horizontal plane with respect to the arm holder.
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