Pirani+capacitive sensor
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United States of America Patent
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Oct 5, 1999
Grant Date -
N/A
app pub date -
Jul 16, 1998
filing date -
Jul 16, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In order to cover a large measuring range extending from about 10.sup.-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) which, together with the support plate (5), forms a capacitive measuring element for the determination of pressures between about 0.1 mbar and 10 bar, and two measuring wires (11, 12) which are arranged adjacent to the membrane (6) and constitute a Pirani measuring element with substantial compensation of the effect of the wall temperature, for the determination of pressures between about 10.sup.-6 mbar and 1 mbar. The membrane (6) is shielded from the radiation of the measuring wires (11, 12) by a protective ring (16).
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