Etching of silicon nitride

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United States of America Patent

PATENT NO 5965465
SERIAL NO

08932865

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Abstract

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Silicon nitride is etched employing a composition containing a fluoride containing compound, certain organic solvents, and water.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jagannathan, Rangarajan South Burlington, VT 29 547
Madden, Karen P Poughquag, NY 12 155
McCullough, Kenneth J Fishkill, NY 25 327
Okorn-Schmidt, Harald F Putnam Valley, NY 17 338
Pope, Keith R Danbury, CT 30 406
Rath, David L Stormville, NY 81 953

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