US Patent No: 5,965,821
Number of patents in Portfolio can not be more than 2000
Pressure sensor
Stats
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Oct 12, 1999
Issued date -
Jul 3, 1997
filing date -
08/887,579
serial no -
In Force
status
Importance
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Abstract
A pressure sensor has a housing for receiving a fluid whose pressure is being sensed, and an electrode assembly and a diaphragm arranged to form a variable capacitor within the housing. In one embodiment, the electrode assembly includes a dielectric disk with a conductive electrode and a standoff being formed on a surface of the disk facing the diaphragm. A spacer ring is provided between the standoff and the diaphragm so that the thickness of the spacer ring sets the gap between the electrode of the electrode assembly and the diaphragm. In another embodiment, the electrode assembly is an integral unit that includes a housing and an electrode such that lower surfaces of the housing and the electrode are coplanar to each other. In this embodiment, the spacer is between the housing and the diaphragm such that the thickness of the ring sets the length of the gap.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,005,421 Pressure sensor and method for the manufacture thereof | 40 | 1989 | |
| 5,001,595 Capacitive pressure sensor and method of manufacturing same | 27 | 1990 | |
| 5,050,034 Pressure sensor and method of manufacturing same | 45 | 1990 | |
| 5,539,611 Interface connection through an insulating part | 34 | 1992 | |
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| 4,358,814 Capacitive pressure sensor | 52 | 1980 | |
| 4,434,203 Diaphragm | 22 | 1980 | |
| 5,150,275 Capacitive pressure sensor | 31 | 1991 | |
| 5,442,962 Capacitive pressure sensor having a pedestal supported electrode | 52 | 1993 | |
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| 4,495,820 Capacitive pressure sensor | 58 | 1982 | |
| 2005/0186,696 Gas flowmeter and manufacturing method thereof | 2005 | ||
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| 4,426,673 Capacitive pressure transducer and method of making same | 57 | 1980 | |
| 5,020,377 Low pressure transducer using metal foil diaphragm | 25 | 1990 | |
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| 5,561,247 Pressure sensor | 16 | 1994 | |
| 5,571,970 Pressure sensor | 18 | 1994 | |
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| 4,823,603 Capacitance manometer having stress relief for fixed electrode | 35 | 1988 | |
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| 4,977,480 Variable-capacitance type sensor and variable-capacitance type sensor system using the same | 51 | 1989 | |
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| 4,735,090 Flange mounted pressure transmitter | 17 | 1986 | |
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| 4,542,436 Linearized capacitive pressure transducer | 70 | 1984 | |
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| 4,935,841 Pressure sensor | 14 | 1989 | |
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| 5,155,653 Capacitive pressure sensor | 27 | 1991 | |
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| 4,785,669 Absolute capacitance manometers | 55 | 1987 | |
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| 4,774,626 Pressure sensor with improved capacitive pressure transducer | 26 | 1987 | |
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| 4,422,125 Pressure transducer with an invariable reference capacitor | 53 | 1982 | |
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| 5,351,548 Capacitive pressure sensor | 26 | 1992 | |
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| 5,349,492 Capacitive pressure sensor | 56 | 1992 | |
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| 5,499,533 Downhole pressure gauge converter | 19 | 1992 | |
| 5,400,489 Method of stabilizing the surface properties of objects to be thermally treated in a vacuum | 27 | 1992 | |