Tool for the contact-free support of plate-like substrates
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United States of America Patent
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Oct 19, 1999
Grant Date -
N/A
app pub date -
May 29, 1998
filing date -
May 29, 1998
priority date (Note) -
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Abstract
The invention relates to a tool for the free support of plate-like substrates, comprising a flat plate-like body with at least one supporting surface wherein at least one gas channel is provided within the body, extending from an outer gas supply end to an inner gas discharge end, the gas discharge end being in fluid communication with a gas distribution chamber, through which gas passes into a dynamically balanced gas slit being arranged radially with respect to the gas distribution chamber predominantly parallel to the supporting surface and opening into the supporting surface at its outer end at an angle >90 and <180.degree..
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