Antivibration support for Czochralski crystal growing systems
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United States of America Patent
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Oct 19, 1999
Grant Date -
N/A
app pub date -
Jan 24, 1997
filing date -
Jan 25, 1996
priority date (Note) -
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Abstract
The uniformity of solid crystals grown by pulling a seed crystal from a molten charge material in a crucible is increased by eliminating vibration by supporting a housing for the solid crystal on a vibration isolator which rests on a supporting floor. Vibration isolators may also be placed between a crucible lift and rotation mechanism and the supporting floor. The crystal pull head for pulling the seed crystal also can be isolated from the remainder of the apparatus by vibration isolators.
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Cited Art Landscape
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