Treatment method in glow-discharge plasma and apparatus thereof
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United States of America Patent
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Oct 19, 1999
Grant Date -
N/A
app pub date -
May 22, 1997
filing date -
May 24, 1996
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Abstract
In a glow-discharge plasma treatment, a substrate is disposed between two opposing electrodes, at least one electrode being covered by a solid dielectric at an opposing surface. An electric field is imposed between the electrodes in an atmospheric pressure. The electric field is pulse modulated such that an onset time, prefeably an offset time as well, of a pulse is less than 100 .mu.s, and field intensity is 1 to 100 kV/cm. Thus, a stable and evenly dispersed discharge-plasma is obtained, which can treat an outer to surface of the substrate.
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