Laser processing apparatus having beam expander
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United States of America Patent
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Oct 19, 1999
Issued Date -
N/A
app pub date -
Oct 23, 1997
filing date -
Jun 26, 1992
priority date (Note) -
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Abstract
An excimer laser annealing apparatus with an optical system. The optical system includes a cylindrical concave lens (A), a cylindrical convex lens (B), a fly-eye lens (C) made of a cylindrical lens array provided in a lateral direction and a fly eye lens (D) made of a cylindrical lens array provided in a vertical direction. The laser light is changed from an initial gaussian distribution to a rectangular distribution by virtue of the fly-eye lenses. The laser beam then passes through cylindrical convex lenses (E and F) and is reflected by a mirror (G) and is focused on the specimen by a cylindrical lens (H). The homogenous rectangular beam created has a longer width than the specimen so that the specimen may only be moved along one direction.
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