Pressure measuring membrane with resonant element vibrating orthogonal to membrane movement
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 19, 1999
Grant Date -
N/A
app pub date -
Oct 29, 1997
filing date -
Oct 31, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An improved device for measuring pressures, comprising a silicon membrane or diaphragm which is exposed, on its two faces, to two pressures whose difference is to be measured. A resonant element is provided on one face of the diaphragm, which is treated by selective chemical etching, and is mechanically coupled to the diaphragm so that its resonance frequency varies as a consequence of the deformation undergone by the diaphragm.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully