Apparatus for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by measurement of magnetic fields with a magneto optic laser probe
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United States of America Patent
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Oct 19, 1999
Issued Date -
N/A
app pub date -
Feb 13, 1998
filing date -
Mar 31, 1994
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Abstract
A laser probe for measuring a magnetic field is disclosed. A polarized laser beam is passed through a magneto-optic crystal in the presence of an unknown magnetic field. The rotation of the polarization which occurs through the magneto-optic crystal is measured in order to determine the magnitude of the magnetic field. The measured magnetic field is used to determine, for example, the current through a conductor such as an interconnect line on a semiconductor chip. A method of calibrating the magnetic field using a known magnetic from a solenoid is also disclosed. Further disclosed is a method of providing a zero-reference current by momentarily stopping the chip clock.
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