Cooling method, cooling apparatus and treatment apparatus
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United States of America Patent
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Oct 26, 1999
Grant Date -
N/A
app pub date -
Mar 12, 1998
filing date -
Mar 13, 1997
priority date (Note) -
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Abstract
An apparatus is provided with a cooling unit for cooling a treatment substrate, a supporting body for supporting the treatment substrate before being transferred to the cooling unit and a cooling apparatus for cooling the treatment substrate supported by the supporting body. The apparatus cools the treatment substrate in a position where the treatment substrate stands by before being transferred into the cooling unit and thereafter cools the cooled treatment substrate in the cooling unit, which makes rapid and accurate cooling possible.
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