Microfabricated cantilever ratchet valve, and method for using same
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United States of America Patent
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Oct 26, 1999
Grant Date -
N/A
app pub date -
Feb 27, 1998
filing date -
Feb 27, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A microfabricated valve includes a substrate with a fluid path. A main cantilever is positionable in a resting closed state to prevent fluid movement through the fluid path and a resting open state that allows fluid movement through the fluid path. A ratchet cantilever supports the main cantilever in either the resting closed state or the resting open state, such that the main cantilever does not have to be energized to maintain the resting closed state or the resting open state. A valve state transition mechanism selectively energizes the main cantilever or the ratchet cantilever during a valve state transition period to selectively transition between the resting open and closed states.
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