Thin film forming apparatus and method
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United States of America Patent
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Oct 26, 1999
Grant Date -
N/A
app pub date -
Aug 15, 1997
filing date -
Aug 22, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A thin film forming apparatus includes a specimen holder on which a substrate for thin film formation is placed, a transfer plate opposing the specimen holder, on which a sheet film having a thin film formed on a surface is placed, a thin film forming chamber comprising the specimen holder and the transfer plate, a pressure unit for moving at least one of the specimen holder and the transfer plate and pressing the specimen holder against the transfer plate for a predetermined time while the substrate and the thin film formed on the sheet film are in contact with each other, a heating unit for heating the substrate at a predetermined temperature, and an exhausting unit for vacuum-exhausting the thin film forming chamber.
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