Sources used in molecular beam epitaxy
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United States of America Patent
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Nov 2, 1999
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N/A
app pub date -
Jul 8, 1998
filing date -
Aug 3, 1995
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Abstract
A source for Molecular Beam Epitaxy (MBE) including an open-ended crucible and a removable orificed covered plate for covering the open end of the crucible, the cover plate having an encapsulated heater, preferably of Pyrolytic Graphite, which reduces orifice blockage.
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