Method for etching

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United States of America Patent

PATENT NO 5976396
SERIAL NO

09021375

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Abstract

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Method for etching metal oxide films, especially tin oxide on a substrate in which a metal (Zn) is deposited on said film and etching is performed by a mixture of an acid, such as hydrochloric acid (HCl) and a metal dissolution agent, such as ferric chloride. The hydrochloric acid reacts with the zinc to produce active hydrogen which reduces the tin oxide to tin, which in turn is etched with the hydrochloric acid.

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Patent Owner(s)

Patent OwnerAddress
FELDMAN TECHNOLOGY CORPORATION25080 SKYLAND ROAD LOS GATOS CA 95033

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feldman, Bernard Corralitos, CA 18 132
McLean, Douglas Los Gatos, CA 13 19

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