Highly compact vertical cavity surface emitting lasers
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United States of America Patent
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Nov 2, 1999
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N/A
app pub date -
Sep 30, 1997
filing date -
Feb 7, 1997
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Abstract
The present invention provides a highly compact vertical cavity surface emitting laser structure formed by a lateral oxidation process. Specifically, the present invention allows for the use of well-controlled oxidized regions to bound and to define the aperture of a laser structure in a current controlling oxidation layer, wherein the aperture comprises a conductive region in the oxidation layer. These oxidized regions are formed by the use of a pre-defined bounding pattern of cavities etched in the laser structure, which allow the embedded oxidation layer to be oxidized, and which results in a highly reproducible and manufacturable process.
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