Mechanism for transporting semiconductor-process masks
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United States of America Patent
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-
Nov 9, 1999
Grant Date -
N/A
app pub date -
Apr 17, 1997
filing date -
Apr 16, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A system for transporting an article between a loading station and an inspection stage includes a novel support for safely retaining the article during transit. The support includes a number of article-retaining members, at least one of which is connected to an actuator. The actuator clamps the article between the article-retaining members during transit. To ensure that the article is not dropped or damaged during transit, the system includes an un-clamp sensor connected to at least one of the article-retaining members. The un-clamp sensor is connected to a robot controller so that the system may be shut down immediately should the article become unclamped during transit. The system also includes novel loading and inspection stages that ensure proper orientation and placement of articles prior to transit from one to the other, further reducing risk of damage to transported articles.
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