Microscope for compliance measurement

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United States of America Patent

PATENT NO 5983712
SERIAL NO

08905815

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.

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Patent Owner(s)

Patent OwnerAddress
KEYSIGHT TECHNOLOGIES INC1400 FOUNTAINGROVE PARKWAY SANTA ROSA CA 95403

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Wenhai Tempe, AZ 5 95
Jing, Tianwei Tempe, AZ 27 903
Lindsay, Stuart M Phoenix, AZ 30 1189

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