Process for the production of an assembly of a membrane pressure sensor and a membrane pressure sensor
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Dec 19, 1997
filing date -
Dec 19, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A membrane pressure sensor has an assembly comprising a thin membrane and a base, on which an annular joining face is formed. The membrane has a waved edge region in which numerous annular wave troughs and wave crests succeed one another alternatingly in the radial direction. The waved edge region of the membrane is attached to the joining face of the base. The wave crests of the edge region form numerous annular protrusions on the side turned away from the joining face, which permit a high sealing action when the assembly is connected with an annular flange having a measurement material space. When the joining face is flat, at least all wave troughs of the waved edge region of the membrane are circumferentially soldered to the joining face. When the joining face is provided with grooves complementary to the waves of the edge region, at least all wave crests of the waved edge region are soldered to the joining face and the waves of the edge region are stamped by pressing the initially flat edge region of a membrane blank against the grooved joining face such that this serves as a die during the stamping process.
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