Developing apparatus and developing method
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Dec 23, 1997
filing date -
Dec 26, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A developing apparatus in which a substrate holding part holds a substrate in a stationary state, and a developer discharge nozzle starts scanning from a scanning start position. After scanning starts, the developer discharge nozzle discharges a developer at a discharge start position before a slit discharge port thereof reaches the substrate. The developer discharge nozzle moves linearly on the substrate in a scanning direction while discharging the developer, passes over the substrate, and thereafter stops discharging the developer at a discharge stop position separated from the substrate. The developer discharge nozzle stops scanning when reaching a scanning stop position.
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