Internally cooled target assembly for magnetron sputtering
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Apr 11, 1997
filing date -
Apr 11, 1997
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An internally cooled target assembly for use in a magnetron sputtering apparatus is provided. The internally cooled target assembly includes a cooling plate that is configured to promote highly turbulent coolant flow through the target assembly to achieve efficient and uniform target cooling. The volume of coolant required to cool the target assembly is minimized.
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