Treating solution supplying method and apparatus
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Jan 26, 1998
filing date -
Jan 28, 1997
priority date (Note) -
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Abstract
A method of supplying a treating solution based on a prestored processing program with a plurality of instructions including a supply start instruction and a supply stop instruction for performing a series of processes. The method includes the steps of executing the supply start instruction to supply the treating solution to a central region of a substrate, executing the supply stop instruction to stop supplying the treating solution when the treating solution has been supplied in a fixed quantity/and executing subsequent instructions in the processing program in response to an actual stoppage in delivering the treating solution following execution of the supply stop instruction.
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