Selected high thermal novolaks and positive-working radiation-sensitive compositions
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Feb 18, 1998
filing date -
Feb 18, 1998
priority date (Note) -
Expired
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Abstract
A high thermal alkali-soluble novolak binder resin, comprising the addition-condensation reaction product of a phenolic mixture with at least one aldehyde source, the feedstock of the phenolic mixture for the reaction comprising: (1) about 25 to about 40 weight percent of the phenolic mixture being a monomer selected from meta-cresol 2,5-xylenol or the combination thereof; (2) about 50 to about 70 weight percent of the phenolic mixture being para-cresol; and (3) about 3 to about 20 weight percent of the phenolic mixture being acetamidophenol; all percentages based on the weight of total phenol monomer feedstock. The invention is also directed to a positive working photoresist made from the composition.
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