Projection optical system, illumination apparatus, and exposure apparatus
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United States of America Patent
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Nov 16, 1999
Issued Date -
N/A
app pub date -
Jul 19, 1996
filing date -
Feb 17, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A projection optical system of the present invention comprises a shaping optical system which is disposed in an optical path between a first surface and a second surface on which an image of the first surface is formed and has a refractive power in only one of two directions which are perpendicular to an optical axis of the projection optical system and orthogonal to each other. This shaping optical system comprises a first lens group which has a refractive power in only one of the two directions which are orthogonal to each other and a second lens group which has a refractive power only in the direction in which the first lens group has the refractive power. Also, the shaping optical system relatively magnifies or reduces the image in one of the two directions orthogonal to each other within the second surface with respect to the image in the other direction and making image-forming positions of the images in the two directions orthogonal to each other within the second surface substantially coincide with each other.
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