US Patent No: 5,986,744
Number of patents in Portfolio can not be more than 2000
Projection optical system, illumination apparatus, and exposure apparatus
Stats
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Nov 16, 1999
Issued date -
Jul 19, 1996
filing date -
08/684,656
serial no -
Expired
status
Importance
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Abstract
A projection optical system of the present invention comprises a shaping optical system which is disposed in an optical path between a first surface and a second surface on which an image of the first surface is formed and has a refractive power in only one of two directions which are perpendicular to an optical axis of the projection optical system and orthogonal to each other. This shaping optical system comprises a first lens group which has a refractive power in only one of the two directions which are orthogonal to each other and a second lens group which has a refractive power only in the direction in which the first lens group has the refractive power. Also, the shaping optical system relatively magnifies or reduces the image in one of the two directions orthogonal to each other within the second surface with respect to the image in the other direction and making image-forming positions of the images in the two directions orthogonal to each other within the second surface substantially coincide with each other.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 4,497,015 Light illumination device | 138 | 1983 | |
| 4,619,508 Illumination optical arrangement | 142 | 1985 | |
| 4,851,978 Illumination device using a laser | 100 | 1987 | |
| 4,939,630 Illumination optical apparatus | 85 | 1988 | |
| 4,970,546 Exposure control device | 139 | 1989 | |
| 4,918,583 Illuminating optical device | 100 | 1989 | |
| 5,117,255 Projection exposure apparatus | 91 | 1991 | |
| 5,307,207 Illuminating optical apparatus | 83 | 1991 | |
| 5,237,367 Illuminating optical system and exposure apparatus utilizing the same | 84 | 1991 | |
| 5,245,384 Illuminating optical apparatus and exposure apparatus having the same | 82 | 1992 | |
| 5,636,003 Illumination optical apparatus and scanning exposure apparatus | 22 | 1994 | |
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| 4,253,724 Recording optical system | 28 | 1979 | |
| 4,253,735 Image forming optical system for semiconductor laser | 33 | 1979 | |
| 4,318,594 Beam shaping optical system | 28 | 1980 | |
| 5,121,160 Exposure method and apparatus | 59 | 1991 | |
| 5,828,496 Illumination optical system | 5 | 1994 | |
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| 5,331,466 Method and apparatus for homogenizing a collimated light beam | 22 | 1991 | |
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| 5,184,223 Electronic imaging apparatus | 12 | 1991 | |
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| 5,499,262 Semiconductor laser light source unit | 16 | 1993 | |
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| 5,159,485 System and method for uniformity of illumination for tungsten light | 64 | 1992 | |
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| 5,467,335 Beam-shaping optical element and device for converting a beam having a first cross-section into a beam having a second cross-section | 70 | 1993 | |
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| 4,316,074 Method and apparatus for laser irradiating semiconductor material | 46 | 1978 | |
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| 4,530,574 Beam collimation and focusing of multi-emitter or broad emitter lasers | 25 | 1984 | |