US Patent No: 5,986,744

Number of patents in Portfolio can not be more than 2000

Projection optical system, illumination apparatus, and exposure apparatus

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A projection optical system of the present invention comprises a shaping optical system which is disposed in an optical path between a first surface and a second surface on which an image of the first surface is formed and has a refractive power in only one of two directions which are perpendicular to an optical axis of the projection optical system and orthogonal to each other. This shaping optical system comprises a first lens group which has a refractive power in only one of the two directions which are orthogonal to each other and a second lens group which has a refractive power only in the direction in which the first lens group has the refractive power. Also, the shaping optical system relatively magnifies or reduces the image in one of the two directions orthogonal to each other within the second surface with respect to the image in the other direction and making image-forming positions of the images in the two directions orthogonal to each other within the second surface substantially coincide with each other.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
NIKON CORPORATIONTOKYO7379

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kudo, Yuji Kawasaki, JP 54 853
Tanitsu, Osamu Saitama, JP 96 803

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NIKON CORPORATION (11)
4,497,015 Light illumination device 139 1983
4,619,508 Illumination optical arrangement 149 1985
4,851,978 Illumination device using a laser 106 1987
4,939,630 Illumination optical apparatus 85 1988
4,970,546 Exposure control device 154 1989
4,918,583 Illuminating optical device 102 1989
5,117,255 Projection exposure apparatus 96 1991
5,307,207 Illuminating optical apparatus 87 1991
5,237,367 Illuminating optical system and exposure apparatus utilizing the same 86 1991
5,245,384 Illuminating optical apparatus and exposure apparatus having the same 82 1992
5,636,003 Illumination optical apparatus and scanning exposure apparatus 24 1994
 
CANON KABUSHIKI KAISHA (5)
4,253,724 Recording optical system 28 1979
4,253,735 Image forming optical system for semiconductor laser 33 1979
4,318,594 Beam shaping optical system 28 1980
5,121,160 Exposure method and apparatus 59 1991
5,828,496 Illumination optical system 5 1994
 
LIONS EYE INSTITUTE OF WESTERN AUSTRALIA INC., THE (1)
5,331,466 Method and apparatus for homogenizing a collimated light beam 25 1991
 
OLYMPUS OPTICAL CO., LTD. (1)
5,184,223 Electronic imaging apparatus 12 1991
 
ROHM CO., LTD. (1)
5,499,262 Semiconductor laser light source unit 16 1993
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,159,485 System and method for uniformity of illumination for tungsten light 64 1992
 
U.S. Philips Corporation (1)
5,467,335 Beam-shaping optical element and device for converting a beam having a first cross-section into a beam having a second cross-section 70 1993
 
USTRUST (1)
4,316,074 Method and apparatus for laser irradiating semiconductor material 48 1978
 
XEROX CORPORATION (1)
4,530,574 Beam collimation and focusing of multi-emitter or broad emitter lasers 25 1984

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
CANON KABUSHIKI KAISHA (1)
8,436,980 Illumination optical apparatus, relay optical system, exposure apparatus, and device manufacturing method 0 2008
 
NIKON CORPORATION (1)
6,686,989 Exposure apparatus 4 2002
 
NIPPON HOSO KYOKAI (1)
7,433,127 Imaging device and display device 0 2005