US Patent No: 5,986,796

Number of patents in Portfolio can not be more than 2000

Visible spectrum modulator arrays

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Abstract

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miles, Mark W San Francisco, CA 191 10142

Cited Art

Patent Info (Count) # Cites Year
 
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5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 306 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 262 1996
 
TEXAS INSTRUMENTS INCORPORATED (3)
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5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
 
U.S. PHILIPS CORPORATION (3)
4,403,248 Display device with deformable reflective medium 322 1981
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COLIBRYS SA (2)
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LOCKHEED MARTIN CORPORATION (2)
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5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 242 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 333 1989
5,233,459 Electric display device 332 1991
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 558 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 292 1993
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 324 1994
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 245 1995
 
CANON KABUSHIKI KAISHA (1)
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1998
 
GEORGIA TECH RESEARCH CORPORATION (1)
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HONEYWELL INC. (1)
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 270 1981
 
MOTOROLA, INC. (1)
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NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 219 1994
 
NORTHROP CORPORATION (1)
5,153,771 Coherent light modulation and detector 170 1990
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 263 1986
 
POPKIN FAMILY ASSETS, L.L.C. (1)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 289 1996
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 209 1987
 
QUALCOMM MEMS TECHNOLOGIES, INC. (1)
5,835,255 Visible spectrum modulator arrays 460 1994
 
QUANTUM DIAGNOSTICS LTD. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 274 1986
 
SOCIETE D'ETUDE DU RADANT (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 176 1982
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
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OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (3)
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4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 170 1984
5,500,635 Products incorporating piezoelectric material 262 1994

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (302)
7,138,984 Directly laminated touch sensitive screen 89 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
7,042,643 Interferometric modulation of radiation 155 2002
7,126,738 Visible spectrum modulator arrays 116 2002
7,110,158 Photonic MEMS and structures 158 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 20 2002
7,297,471 Method for manufacturing an array of interferometric modulators 17 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
7,012,726 MEMS devices with unreleased thin film components 65 2003
7,198,973 Method for fabricating an interference display unit 89 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 128 2003
7,692,844 Interferometric modulation of radiation 10 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
7,706,050 Integrated modulator illumination 27 2004
7,193,768 Interference display cell 22 2004
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 25 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
7,060,895 Modifying the electro-mechanical behavior of devices 38 2004
7,280,265 Interferometric modulation of radiation 40 2004
7,164,520 Packaging for an interferometric modulator 30 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 45 2004
7,855,824 Method and system for color optimization in a display 15 2005
7,893,919 Display region architectures 2 2005
7,813,026 System and method of reducing color shift in a display 10 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 10 2005
7,424,198 Method and device for packaging a substrate 2 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 22 2005
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,349,141 Method and post structures for interferometric modulation 19 2005
7,142,346 System and method for addressing a MEMS display 26 2005
7,515,147 Staggered column drive circuit systems and methods 9 2005
7,379,227 Method and device for modulating light 10 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,460,246 Method and system for sensing light using interferometric elements 8 2005
7,560,299 Systems and methods of actuating MEMS display elements 7 2005
7,012,732 Method and device for modulating light with a time-varying signal 53 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 2 2005
7,928,928 Apparatus and method for reducing perceived color shift 4 2005
7,259,449 Method and system for sealing a substrate 12 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 3 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 5 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 12 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 7 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 7 2005
7,299,681 Method and system for detecting leak in electronic devices 1 2005
7,920,135 Method and system for driving a bi-stable display 2 2005
7,679,627 Controller and driver features for bi-stable display 1 2005
7,586,484 Controller and driver features for bi-stable display 12 2005
7,535,466 System with server based control of client device display features 5 2005
7,532,195 Method and system for reducing power consumption in a display 2 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,289,256 Electrical characterization of interferometric modulators 10 2005
7,602,375 Method and system for writing data to MEMS display elements 0 2005
7,916,103 System and method for display device with end-of-life phenomena 1 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,573,547 System and method for protecting micro-structure of display array using spacers in gap within display device 6 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 1 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,889,163 Drive method for MEMS devices 6 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 3 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
7,808,703 System and method for implementation of interferometric modulator displays 2 2005
7,349,136 Method and device for a display having transparent components integrated therein 7 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,710,629 System and method for display device with reinforcing substance 3 2005
8,124,434 Method and system for packaging a display 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,471,444 Interferometric modulation of radiation 12 2005
7,388,706 Photonic MEMS and structures 10 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 18 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
8,004,504 Reduced capacitance display element 3 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,508,571 Optical films for controlling angular characteristics of displays 27 2005
7,417,783 Mirror and mirror layer for optical modulator and method 7 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 12 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 7 2005
8,031,133 Method and device for manipulating color in a display 3 2005
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
7,304,784 Reflective display device having viewable display on both sides 33 2005
7,525,730 Method and device for generating white in an interferometric modulator display 15 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,463,421 Method and device for modulating light 15 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 23 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 14 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
8,102,407 Method and device for manipulating color in a display 8 2005
7,911,428 Method and device for manipulating color in a display 14 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 17 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 144 2005
7,369,294 Ornamental display device 38 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 19 2005
7,684,104 MEMS using filler material and method 7 2005
7,898,521 Device and method for wavelength filtering 17 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,653,371 Selectable capacitance circuit 10 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 3 2005
7,675,669 Method and system for driving interferometric modulators 2 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 10 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
8,310,441 Method and system for writing data to MEMS display elements 0 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
7,486,429 Method and device for multistate interferometric light modulation 8 2005
7,236,284 Photonic MEMS and structures 82 2005
7,630,114 Diffusion barrier layer for MEMS devices 1 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 6 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 1 2005
7,355,779 Method and system for driving MEMS display elements 1 2006
7,916,980 Interconnect structure for MEMS device 0 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 4 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 40 2006
7,483,197 Photonic MEMS and structures 16 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 11 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,643,203 Interferometric optical display system with broadband characteristics 17 2006
7,948,457 Systems and methods of actuating MEMS display elements 0 2006
7,903,047 Mode indicator for interferometric modulator displays 2 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 0 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 1 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
8,049,713 Power consumption optimized display update 1 2006
7,920,136 System and method of driving a MEMS display device 0 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,848,001 Method and system for interferometric modulation in projection or peripheral devices 4 2006
7,907,319 Method and device for modulating light with optical compensation 19 2006
7,161,094 Modifying the electro-mechanical behavior of devices 17 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 60 2006
7,187,489 Photonic MEMS and structures 74 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,777,715 Passive circuits for de-multiplexing display inputs 2 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 3 2006
7,566,940 Electromechanical devices having overlying support structures 7 2006
7,534,640 Support structure for MEMS device and methods therefor 13 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 3 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 24 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 2 2006
7,928,940 Drive method for MEMS devices 0 2006
7,898,722 Microelectromechanical device with restoring electrode 26 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 4 2006
7,385,748 Visible spectrum modulator arrays 26 2006
7,388,697 System and method for addressing a MEMS display 5 2006
7,242,512 System and method for addressing a MEMS display 6 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,706,042 MEMS device and interconnects for same 2 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 23 2006
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 0 2007
7,872,792 Method and device for modulating light with multiple electrodes 4 2007
7,403,180 Hybrid color synthesis for multistate reflective modulator displays 17 2007
7,846,344 Method and device for modulating light 0 2007
7,518,775 Method and system for packaging a MEMS device 6 2007
7,733,552 MEMS cavity-coating layers and methods 3 2007
7,746,537 MEMS devices and processes for packaging such devices 9 2007
7,715,080 Packaging a MEMS device using a frame 1 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 0 2007
7,826,127 MEMS device having a recessed cavity and methods therefor 0 2007
7,782,517 Infrared and dual mode displays 4 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 21 2007
7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function 14 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,127 Method and system for sealing a substrate 2 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 14 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 10 2007
8,081,369 System and method for a MEMS device 0 2007
7,852,545 Method and device for modulating light 8 2007
7,839,556 Method and device for modulating light 0 2007
7,826,120 Method and device for multi-color interferometric modulation 8 2007
7,808,694 Method and device for modulating light 8 2007
7,800,809 System and method for a MEMS device 0 2007
7,738,157 System and method for a MEMS device 11 2007
7,629,678 Method and system for sealing a substrate 1 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 2 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 2 2007
7,605,969 Interferometric modulation of radiation 18 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 2 2007
7,982,700 Conductive bus structure for interferometric modulator array 0 2007
7,556,917 Method for manufacturing an array of interferometric modulators 11 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 16 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 6 2007
7,847,999 Interferometric modulator display devices 1 2008
8,111,445 Spatial light modulator with integrated optical compensation structure 1 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 4 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 2 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 1 2008
7,894,076 Electro-optical measurement of hysteresis in interferometric modulators 1 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 1 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 0 2008
7,719,747 Method and post structures for interferometric modulation 13 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 1 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,045,835 Method and device for packaging a substrate 1 2008
7,848,003 Semi-transparent/transflective lighted interferometric devices 9 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
8,169,686 Display with integrated photovoltaics 0 2008
8,130,440 Display with integrated photovoltaic device 0 2008
8,054,527 Adjustably transmissive MEMS-based devices 0 2008
7,672,035 Separable modulator 15 2008
8,193,441 Photovoltaics with interferometric ribbon masks 0 2008
8,111,446 Optical films for controlling angular characteristics of displays 1 2008
7,978,396 Optical interference display panel 1 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 0 2009
7,646,529 Method and device for multistate interferometric light modulation 1 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 11 2009
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
8,061,882 Illumination device with built-in light coupler 0 2009
8,115,983 Method and system for packaging a MEMS device 0 2009
7,889,415 Device having a conductive light absorbing mask and method for fabricating same 4 2009
8,098,431 Method and device for generating white in an interferometric modulator display 0 2009
8,081,370 Support structures for electromechanical systems and methods of fabricating the same 0 2009
8,004,736 Optical interference display panel and manufacturing method thereof 0 2009
7,986,451 Optical films for directing light towards active areas of displays 0 2009
8,368,124 Electromechanical devices having etch barrier layers 0 2009
7,906,353 Method of fabricating interferometric devices using lift-off processing techniques 0 2009
8,405,899 Photonic MEMS and structures 0 2009
8,379,392 Light-based sealing and device packaging 0 2009
8,054,528 Display device having an array of spatial light modulators with integrated color filters 2 2009
7,935,555 Method and system for sealing a substrate 0 2009
7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator 1 2009
7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator 0 2009
7,995,265 Interferometric modulators having charge persistence 0 2009
8,422,108 Method and device for modulating light with optical compensation 0 2009
8,144,385 Method and device for multistate interferometric light modulation 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 4 2010
7,933,476 Method and device for providing electronic circuitry on a backplate 3 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,852,544 Separable modulator 31 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
7,929,197 System and method for a MEMS device 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,344,997 Method and system for writing data to electromechanical display elements 0 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 0 2010
8,035,884 Method and device for modulating light with semiconductor substrate 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,094,362 Method and system for color optimization in a display 0 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,416,154 Apparatus and method for reducing perceived color shift 0 2011
8,090,229 Method and device for providing electronic circuitry on a backplate 1 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,385,714 Methods for visually inspecting interferometric modulators for defects 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,437,070 Interferometric modulator with dielectric layer 0 2011
 
SILICON LIGHT MACHINES CORPORATION (40)
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 24 2000
6,466,354 Method and apparatus for interferometric modulation of light 253 2000
7,177,081 High contrast grating light valve type device 5 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 24 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 59 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,639,722 Stress tuned blazed grating light valve 8 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 60 2002
6,991,953 Microelectronic mechanical system and methods 9 2002
6,767,751 Integrated driver process flow 3 2002
6,728,023 Optical device arrays with optimized image resolution 18 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 5 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 19 2002
6,829,258 Rapidly tunable external cavity laser 27 2002
6,908,201 Micro-support structures 2 2002
6,813,059 Reduced formation of asperities in contact micro-structures 65 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 1 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 2 2002
6,712,480 Controlled curvature of stressed micro-structures 6 2002
7,049,164 Microelectronic mechanical system and methods 50 2002
6,928,207 Apparatus for selectively blocking WDM channels 1 2002
7,057,819 High contrast tilting ribbon blazed grating 1 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 0 2002
6,934,070 Chirped optical MEM device 3 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 4 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 2 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 5 2003
7,391,973 Two-stage gain equalizer 0 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 52 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 2 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 1 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
PIXTRONIX, INC. (29)
7,417,782 Methods and apparatus for spatial light modulation 15 2005
7,304,785 Display methods and apparatus 21 2005
7,304,786 Methods and apparatus for bi-stable actuation of displays 23 2005
7,271,945 Methods and apparatus for actuating displays 20 2005
8,159,428 Display methods and apparatus 0 2006
7,755,582 Display methods and apparatus 1 2006
7,742,016 Display methods and apparatus 1 2006
7,616,368 Light concentrating reflective display methods and apparatus 1 2006
7,405,852 Display apparatus and methods for manufacture thereof 25 2006
7,876,489 Display apparatus with optical cavities 12 2006
7,619,806 Methods and apparatus for spatial light modulation 4 2006
8,310,442 Circuits for controlling display apparatus 0 2006
7,502,159 Methods and apparatus for actuating displays 10 2007
7,365,897 Methods and apparatus for spatial light modulation 15 2007
7,675,665 Methods and apparatus for actuating displays 4 2007
7,839,356 Display methods and apparatus 3 2007
7,636,189 Display methods and apparatus 2 2007
7,551,344 Methods for manufacturing displays 3 2007
7,927,654 Methods and apparatus for spatial light modulation 1 2007
7,852,546 Spacers for maintaining display apparatus alignment 4 2007
7,746,529 MEMS display apparatus 4 2007
7,742,215 Methods and apparatus for spatial light modulation 0 2007
7,460,290 Methods and apparatus for spatial light modulation 9 2008
7,729,037 Methods and apparatus for spatial light modulation 0 2008
7,898,714 Methods and apparatus for actuating displays 0 2008
7,920,317 Display with controlled formation of bubbles 1 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
7,999,994 Display apparatus and methods for manufacture thereof 0 2009
8,169,679 MEMS anchors 0 2009
 
CHEETAH OMNI, LLC (24)
6,407,851 Micromechanical optical switch 164 2000
7,136,588 Apparatus and method for optical add/drop multiplexing 2 2000
6,856,459 Apparatus and method for controlling polarization of an optical signal 4 2000
6,721,475 Apparatus and method for providing gain equalization 4 2000
6,493,488 Apparatus and method for high speed optical signal processing 13 2000
6,721,473 Variable blazed grating based signal processing 7 2001
6,445,502 Variable blazed grating 62 2001
6,844,974 Variable blazed grating 5 2002
6,654,157 Micromechanical optical switch 9 2002
6,597,491 Micromechanical optical switch 6 2002
6,900,919 Variable blazed grating 3 2003
6,795,605 Micromechanical optical switch 7 2003
6,847,479 Variable blazed grating 7 2003
6,943,925 Optical logic gate based optical router 14 2003
6,882,771 Apparatus and method for providing gain equalization 7 2003
6,859,301 Micromechanical optical switch 50 2004
6,940,647 Apparatus and method for controlling polarization of an optical signal 2 2004
6,972,886 Variable blazed grating 3 2004
6,950,225 Micromechanical optical switch 2 2004
7,339,714 Variable blazed grating based signal processing 0 2005
7,116,862 Apparatus and method for providing gain equalization 5 2005
7,142,347 Method and system for processing photonic systems using semiconductor devices 54 2005
7,145,704 Optical logic gate based optical router 2 2005
7,522,836 Optical logic gate based optical router 3 2006
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (14)
7,370,185 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers 4 2003
7,072,093 Optical interference pixel display with charge control 96 2003
6,850,352 Method and system for generating color using a low-resolution spatial color modulator and a high-resolution modulator 9 2004
7,044,606 Projection of pixelized color images 1 2004
7,110,122 Interferometer calibration methods and apparatus 2 2004
7,436,389 Method and system for controlling the output of a diffractive light device 0 2004
6,980,346 Display device 9 2004
7,092,137 Method and system for generating color using a low-resolution spatial color modulator and a high-resolution modulator 1 2004
7,733,553 Light modulator with tunable optical state 2 2005
7,447,891 Light modulator with concentric control-electrode structure 2 2005
7,218,438 Optical electronic device with partial reflector layer 11 2005
7,221,497 Optical interference pixel display 2 2005
7,212,292 Interferometer calibration methods and apparatus 2 2006
7,741,751 MEMS device having distance stops 1 2006
 
DONNELLY CORPORATION (10)
7,526,103 Imaging system for vehicle 98 2005
7,423,522 Tire pressure alert system 16 2005
7,616,781 Driver assistance system for vehicle 13 2009
7,792,329 Imaging system for vehicle 3 2009
7,873,187 Driver assistance system for vehicle 4 2010
7,949,152 Driver assistance system for vehicle 2 2010
8,189,871 Vision system for vehicle 1 2011
8,090,153 Imaging system for vehicle 1 2011
8,362,885 Vehicular rearview mirror system 0 2011
8,325,986 Imaging system for vehicle 0 2011
 
MAGNA ELECTRONICS INC. (5)
8,376,595 Automatic headlamp control 0 2010
8,070,332 Automatic lighting system with adaptive function 1 2011
8,217,830 Forward facing sensing system for a vehicle 2 2011
8,142,059 Automatic lighting system 0 2011
8,294,608 Forward facing sensing system for vehicle 0 2012
 
GOPALA SOLUTIONS LIMITED LIABILITY COMPANY (2)
7,429,983 Packet-based digital display system 7 2006
8,379,061 Packet-based digital display system 0 2008
 
INTEL CORPORATION (2)
7,362,316 Light modulator having pixel memory decoupled from pixel display 1 2002
7,956,857 Light modulator having pixel memory decoupled from pixel display 0 2007
 
UNIVERSITY OF CINCINNATI (2)
7,123,796 Light emissive display based on lightwave coupling 58 2003
7,430,355 Light emissive signage devices based on lightwave coupling 25 2006
 
AXSUN TECHNOLOGIES, INC. (1)
6,341,039 Flexible membrane for tunable fabry-perot filter 53 2000
 
HARRIS CORPORATION (1)
7,009,570 Phased array antenna absorber and associated methods 4 2003
 
IDC, LLC (1)
6,589,625 Hermetic seal and method to create the same 256 2001
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 27 2004
 
LUCENT TECHNOLOGIES INC. (1)
6,337,753 Optical power equalizer 8 1998
 
OPTIC NET, INC. (1)
6,449,410 Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels 0 2001
 
PITRONIX, INC. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 0 2011
 
QUALCOMM INCORPORATED (1)
7,532,385 Optical interference display panel and manufacturing method thereof 10 2004
 
QUALCOMM MEMS TECHNOLOGIES CO., LTD. (1)
7,172,915 Optical-interference type display panel and method for making the same 69 2004
 
SEIKO EPSON CORPORATION (1)
7,034,981 Optical modulator, display device and manufacturing method for same 81 2004
 
SHARP KABUSHIKI KAISHA (1)
7,957,049 Highly reflective MEMS device 0 2010
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (1)
6,177,909 Spatially light modulated reconfigurable photoconductive antenna 11 1999
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 5 2005
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (3)
8,446,470 Combined RGB and IR imaging sensor 0 2008
8,446,674 Method and structure capable of changing color saturation 0 2010
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2012