Importance

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Abstract

A dresser includes a super-abrasive fixed by electroplating on a working face which is disposed perpendicular to the axis of rotation of the dresser, the height of protrusion of particles of the super-abrasive is 5 to 30% of an average diameter of the particles, and a process for producing such a dresser includes temporarily fixing the super-abrasive in an amount to form a single layer to a base metal by electroplating, removing loose stones in the temporarily fixed super-abrasive by a grinder or shaking, electroplating a surface having the temporarily fixed super-abrasive with a metal until thickness of the plating metal reaches height of the most protruded part of the super-abrasive or until particles of the super-abrasive are completely buried in the plating metal, and working the electroplated surface for abrasive protrusion to expose most protruded parts of the super-abrasive resulting in a high accuracy dresser which enables dressing of a polishing pad in a short time and eliminates the releasing of particles of the super-abrasive with excellent flatness to the polishing pad.

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First Claim