Membrane-actuated charge controlled mirror
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United States of America Patent
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Nov 23, 1999
Grant Date -
N/A
app pub date -
Oct 15, 1998
filing date -
Oct 15, 1998
priority date (Note) -
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Abstract
An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.
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