US Patent No: 5,991,066
Number of patents in Portfolio can not be more than 2000
Membrane-actuated charge controlled mirror
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Nov 23, 1999
Issued date -
Oct 15, 1998
filing date -
09/172,613
serial no -
In Force
status
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Abstract
An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 4,441,791 Deformable mirror light modulator | 589 | 1982 | |
| 4,680,579 Optical system for projection display using spatial light modulator device | 101 | 1983 | |
| 4,710,732 Spatial light modulator and method | 468 | 1984 | |
| 4,615,595 Frame addressed spatial light modulator | 377 | 1984 | |
| 4,956,619 Spatial light modulator | 553 | 1988 | |
| 5,083,857 Multi-level deformable mirror device | 514 | 1990 | |
| 5,142,405 Bistable DMD addressing circuit and method | 321 | 1990 | |
| 5,172,262 Spatial light modulator and method | 374 | 1992 | |
| 5,280,277 Field updated deformable mirror device | 311 | 1992 | |
| 5,452,024 DMD display system | 389 | 1993 | |
| 5,448,314 Method and apparatus for sequential color imaging | 392 | 1994 | |
| 5,444,566 Optimized electronic operation of digital micromirror devices | 346 | 1994 | |
| 5,650,881 Support post architecture for micromechanical devices | 251 | 1994 | |
| 5,504,614 Method for fabricating a DMD spatial light modulator with a hardened hinge | 105 | 1995 | |
| 5,579,151 Spatial light modulator | 68 | 1995 | |
| 5,567,334 Method for creating a digital micromirror device using an aluminum hard mask | 230 | 1995 | |
| 5,706,061 Spatial light image display system with synchronized and modulated light source | 144 | 1995 | |
| 5,535,047 Active yoke hidden hinge digital micromirror device | 438 | 1995 | |
| 5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer | 380 | 1995 | |
| 5,631,782 Support post architecture for micromechanical devices | 75 | 1995 | |
| 5,774,196 Method and apparatus of aligning color modulation data to color wheel filter segments | 68 | 1996 | |
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| 4,744,636 Electron beam-addressed liquid crystal cell having coating layer for secondary electron emission | 17 | 1987 | |
| 4,765,717 Liquid crystal light valve with electrically switchable secondary electron collector electrode | 13 | 1987 | |
| 4,784,883 Liquid crystal cell and method of assembly of same | 12 | 1987 | |
| 4,884,874 Method of addressing display regions in an electron beam-addressed liquid crystal light valve | 15 | 1988 | |
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| 5,196,767 Spatial light modulator assembly | 30 | 1991 | |
| 5,287,215 Membrane light modulation systems | 167 | 1991 | |
| 5,471,341 Membrane light modulating systems | 156 | 1993 | |
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| 5,636,070 Thin film actuated mirror array | 24 | 1995 | |
| 5,669,687 Optical projection system | 31 | 1996 | |
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| 4,728,174 Electron beam addressed liquid crystal light valve | 25 | 1986 | |
| 4,826,293 Electron beam addressed liquid crystal light valve with input sheet conductor | 20 | 1987 | |
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| 5,768,009 Light valve target comprising electrostatically-repelled micro-mirrors | 94 | 1997 | |
| 5,926,309 Light valve target comprising electrostatically-repelled micro-mirrors | 90 | 1998 | |
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| 4,229,732 Micromechanical display logic and array | 155 | 1978 | |
| 4,592,628 Mirror array light valve | 94 | 1981 | |
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| 5,416,514 Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve | 58 | 1992 | |
| 5,508,738 Single panel color porjection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light | 62 | 1995 | |
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| 5,085,497 Method for fabricating mirror array for optical projection system | 77 | 1990 | |
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| 5,552,925 Electro-micro-mechanical shutters on transparent substrates | 217 | 1993 | |
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| 4,805,038 Imaging apparatus which includes a light-valve array having electrostatically deflectable elements | 53 | 1987 | |
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| 5,677,784 Array of pellicle optical gates | 46 | 1995 | |
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| 4,387,964 Electron addressed liquid crystal light valve | 25 | 1980 | |
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| 4,786,149 Arrangement for optical image processing | 48 | 1987 | |
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| 4,698,602 Micromirror spatial light modulator | 89 | 1985 | |
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| 5,442,414 High contrast illumination system for video projector | 139 | 1994 | |
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| 5,493,439 Enhanced surface deformation light modulator | 100 | 1992 | |
| 5,557,177 Enhanced electron beam addressed storage target | 36 | 1994 | |
| 5,822,110 Reflective light valve modulator | 77 | 1997 | |