Detecting groups of defects in semiconductor feature space
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 23, 1999
Issued Date -
N/A
app pub date -
Apr 2, 1997
filing date -
May 4, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Techniques for improving manufacturing process control based on inspection of manufactured items at intermediate process steps, based on clustering and binning of defect data. Additionally, the using the defect data produced by inspection machines to improve manufacturing process control specifically relating to semiconductor manufacturing process control. Examples described here relate specifically to semiconductor wafers, but may be generalized to any manufacturing process.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully